Process for depositing a thin layer on a plastic s

专利名称：Process for depositing a thin layer on a

plastic substrate

发明人：VERZARO, FRANCIS,FERRY, DIDIER申请号：EP94402111.2申请日：19940922公开号：EP0650772A1公开日：19950503

摘要：The invention relates to a process for depositing, using plasma polymerisation,a layer or a protective film on the surface of a plastic substrate. It comprises at least thesteps of: 1. pretreatment consisting in arranging the plastic substrate on a substrateholder which is only slightly biased or not biased, in subjecting it to at least onepretreatment gas allowing influx of oxygen and in supplying, within the gaseous

pretreatment medium, a minimal quantity of energy to create a quantity of oxygen in theplasma for the purpose of activating the surface of the substrate, this energy beingsupplied in the form of an electric power density pulse, and 2. deposition of the layer orthe film on the surface of the substrate by means of a plasma consisting of a gaseousdeposition mixture comprising at least one gas allowing influx of oxygen and an organicsilicon-containing compound.

申请人：ATOHAAS HOLDING C.V.

地址：Schipholpoort 60 NL-2034 MB Haarlem NL

国籍：NL

代理机构：Luziau, Nelly

更多信息请下载全文后查看